Analyses and Application Areas Performed with SEM

Surface Morphology Examination: For example, the investigation of features such as surface topography, grain size, and shape.
Elemental Analysis: Detection of the elements present in the sample and determination of their quantities.
Component Analysis: Determination of the chemical compositions of the components in the sample.
Crystallographic Structure Analysis: For example, studying the crystallographic structure and determining crystal orientations.
Particle Analysis: Gaining information about the size, shape, and chemical composition of particles in the sample.
Surface Coating Analysis: For example, obtaining information about the thickness and composition of surface coatings.

These analyses are utilized in materials science, nanotechnology, geology, physics, biology, chemistry, and many other fields, playing a significant role in the characterization of materials, quality control, and research and development activities.

Technical Specifications

• Resolution: 0.6 nm (10 kV) - 0.8 nm (1 kV)
• Magnification: 20x - 2,000,000x
• Voltage: 0.1 - 30 kV

Detectors:

• Upper Detector (UD): Surface information
• Middle Detector (MD): Composition information
• Lower Detector (LD): Topography, surface roughness information
• Semiconductor Type Backscattered Electron Detector (PD-BSE): Detailed information about atomic composition and surface properties
• Ultra Variable Pressure Detector (UVD): Operates in low vacuum (LD) and high vacuum (CL) modes
• STEM Detector: Information about the internal structures of biological samples, thin films, or polymeric materials
• Energy Dispersive X-ray Spectrometer (EDS) Detector: Oxford Ultim-Max 100 model EDS detector with a 100 mm² detector area for determining the elemental composition and distribution of the sample

Vacuum: 5~300 Pa